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020 _a007048709x
_c375
040 _aMAIN
041 _aEnglish
082 _a621.381
_bHSU
100 _aHsu, Tai-Ran
245 _aMems & microsystems
_bdesign and manufacture
260 _aNew Delhi
_bTata McGrow- Hill Publishing
_c2004
300 _axii,436p.
650 _aElectronics
650 _aEngineering
942 _cBK
999 _c34094
_d34094