| 000 | 00578nam a2200205Ia 4500 | ||
|---|---|---|---|
| 005 | 20250619145350.0 | ||
| 008 | 250619s9999||||xx |||||||||||||| ||und|| | ||
| 020 |
_a9788179928998 _c795 |
||
| 040 | _aMAIN | ||
| 041 | _aEnglish | ||
| 082 |
_a621.395 _bHEL |
||
| 100 | _aHelbert, John N. | ||
| 245 | 0 |
_aHandbook of VLSI microlithography _b: principles, tools, technology and applications |
|
| 260 |
_aAhmedabad _b; Jaico Publishing House _c, 2009 |
||
| 300 | _axvi,1001p. | ||
| 650 | _aElectronic Circuit | ||
| 650 | _aElectronics | ||
| 650 | _aEngineeing | ||
| 942 | _cBK | ||
| 999 |
_c128612 _d128612 |
||