| 000 | 00505nam a2200193Ia 4500 | ||
|---|---|---|---|
| 005 | 20250619145327.0 | ||
| 008 | 250619s9999||||xx |||||||||||||| ||und|| | ||
| 020 |
_a007048709x _c375 |
||
| 040 | _aMAIN | ||
| 041 | _aEnglish | ||
| 082 |
_a621.381 _bHSU |
||
| 100 | _aHsu, Tai-Ran | ||
| 245 | 0 |
_aMems and microsystems _b: design and manufacture |
|
| 260 |
_aNew Delhi _b; Tata Mcgrow- Hill Publishing _c, 2004 |
||
| 300 | _axii,436p. | ||
| 650 | _aElectronics | ||
| 650 | _aEngineering | ||
| 942 | _cBK | ||
| 999 |
_c127582 _d127582 |
||