TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - Mems & microsystems: design and manufacture
SN  - 007048709x
U1  - 621.381 
PY  - 2004///
CY  - New Delhi
PB  - Tata McGrow- Hill Publishing
KW  - Electronics
KW  - Engineering
ER  -