TY  - BOOK
AU  - Helbert, John N.
TI  - Handbook of VLSI microlithography: : principles, tools, technology and applications
SN  - 9788179928998
U1  - 621.395 
PY  - 2009///
CY  - Ahmedabad
PB  - ; Jaico Publishing House
KW  - Electronic Circuit
KW  - Electronics
KW  - Engineeing
ER  -