Helbert, John N. <br/><br/>
Handbook of VLSI microlithography  : principles, tools, technology and applications 

 - Ahmedabad  ; Jaico Publishing House  , 2009 
 - xvi,1001p. 
<br/><br/><label>ISBN: </label>9788179928998  795 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic Circuit<br/>Electronics<br/>Engineeing
<br/><br/><label>Dewey Class. No.: </label>621.395  / HEL