Hsu, Tai-Ran <br/><br/>
Mems and microsystems  : design and manufacture 

 - New Delhi  ; Tata Mcgrow- Hill Publishing  , 2004 
 - xii,436p. 
<br/><br/><label>ISBN: </label>007048709x  375 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics<br/>Engineering
<br/><br/><label>Dewey Class. No.: </label>621.381  / HSU