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Mems and microsystems : design and manufacture

Hsu, Tai-Ran

Mems and microsystems : design and manufacture - New Delhi ; Tata Mcgrow- Hill Publishing , 2004 - xii,436p.

ISBN: 007048709x 375

Subjects--Topical Terms:
Electronics
Engineering

Dewey Class. No.: 621.381 / HSU

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